Abstract
ABSTRACTWe have deposited thin films of diamond-like-carbon by plasma enhanced chemical vapor deposition, and examined the electron emission characteristics of the optimized DLC-coated field emitters. The bonding spectra and microstractures are controlled by energetic ions depending on deposition parameters which affect the structural, optical, and electrical characteristics. Raman spectra and IR analysis identify that as-deposited DLC contains mixtures of sp2- and sp3-bonding with a wide range of hydrogen, but annealing causes its conversion to graphite structure due to a depletion of hydrogen. From the measurement of field emission characteristics, turn-on gate voltage is lowered to 50 V and anode current is increased for DLC-coated Si field emitter tip arrays.
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