Abstract
Quinary CrAlTiSiN coatings have been prepared on cemented carbide and Si substrates using Cr and AlTi (67:33at.%) alloy targets in the mixture flow of N2 and SiH4 gas by multi-arc ion plating method. X-ray diffraction and transmission electron microscopy revealed that the multi-element coatings had a nc-CrSiN/nc-AlTiSiN multilayered structure with a thickness period of 10nm. The microhardness and wear of the coatings were found to be strongly influenced by SiH4 flow rate. The hardness increased monotonically with the increase of SiH4 flow rate and reached 37GPa at 23sccm. The coatings exhibit friction coefficients varying between 0.58 and 0.76 against Si3N4 ball.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
