Deposition of CeO2/TCP Thin Film on Stainless Steel 316 L by RF sputtering

Hiba A Abdullah,Rana A Anaee,Ahmed M Al-Ghaban

doi:10.30684/etj.2021.168140

Abstract

RF sputtering method was used for deposition 70wt% CeO2/TCP thin film on stainless steel 316L surface. The selection of ceria and tricalcium phosphate is according to the fact the importance of these materials in biomedical media. The produced coating was characterized by XRD, FESEM/EDS and AFM analysis, the result revealed that the obtained peaks from XRD refer to the deposited materials. When substitution of Ce was done, distorting of the lattice structure can occur suggesting certain incorporation of the cerium oxide within TCP lattice. Also, from SEM investigation uniformly homogeneous surface as a layer of (CeO2 + CaO) and TCP as sharp plate-like crystals. EDS analysis of coating confirms the presence of Ce, Ca, O and P elements, thickness was determined at 130.7 nm. The soaking in Simulation body fluid indicated the formation of layers like hydroxyapatite, which investigated by XRD and FESEM/EDS methods.

Highlights

Sputtering techniques have been widely used as a coating method during the last decade, as the DC and radio frequency magnetron (RF) sputtering method in their two design; balanced and unbalanced magnetron in industrial applications such as thin films for decoration purposes, hard films to reduce wear and friction and increase corrosion resistance, and thin films used as a protective optical system, in addition to applications in the electronic industry
The surface of titanium substrates was modified as mentioned in many studies by using a TCP coating by using a radio frequency magnetron (RF) sputtering as coating method and with different powers ranging from 75 to 150 W [1], for hard-tissue implant applications onto Ti-6Al-4V substrates using RF magnetron sputtering [2, 3], and deposition of CaP by RF magnetron sputtering onto 316L SS [4,5,6]
We suggested depositing cerium oxide/TCP coating on SS 316L to investigate the role of the suggested produced coating for bio applications by the RF sputtering method due to the advantages of this method

Summary

INTRODUCTION

Sputtering techniques have been widely used as a coating method during the last decade, as the DC and RF sputtering method in their two design; balanced and unbalanced magnetron in industrial applications such as thin films for decoration purposes, hard films to reduce wear and friction and increase corrosion resistance, and thin films used as a protective optical system, in addition to applications in the electronic industry. The surface of titanium substrates was modified as mentioned in many studies by using a TCP coating by using a radio frequency magnetron (RF) sputtering as coating method and with different powers ranging from 75 to 150 W [1], for hard-tissue implant applications onto Ti-6Al-4V substrates using RF magnetron sputtering [2, 3], and deposition of CaP by RF magnetron sputtering onto 316L SS [4,5,6]. We suggested depositing cerium oxide/TCP coating on SS 316L to investigate the role of the suggested produced coating for bio applications by the RF sputtering method due to the advantages of this method

Sample Preparation

Coating Process

Characterization

Biological Properties

CONCLUSION