Abstract
ABSTRACT Polycrystalline fatigue-free Sm-substituted bismuth titanate thin films have been prepared on platinized silicon substrates by pulsed laser deposition (PLD) and chemical solution deposition (CSD), using similar annealing temperatures (∼700°C). X-ray diffraction and Raman spectroscopy results showed similar crystallographic orientations and structures for films fabricated using these different deposition methods. Atomic force microscopy showed that the surface roughness values were comparable, although PLD-grown films showed a more uniform and slightly larger surface feature size. Cross-sectional images obtained by scanning electron microscopy revealed dense, columnar grains for PLD-grown films compared to a more porous structure with isotropic grains for CSD-derived films. The piezoelectric response of both film types was studied using piezoresponse force microscopy, clearly showing domain switching and a strong correlation between grain structure and domain structure. The PLD-grown films showed higher remanent polarization, lower coercive field, lower leakage current density, and higher piezoelectric coefficient than CSD-derived films.
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