Abstract
Indian-tin-oxide ITO transparent conductive films were deposited by the Reactive low-voltage ion plating (RLVIP) technique. CO 2 and O 2 gases were used as reactive gases coming into the vacuum. The effect of the CO 2 gas flow rate on the optical and electrical properties of the ITO films was studied in detail. The results showed that the CO 2 gas had similar oxidizing action to O 2 except for the magnitude of the flow rate. But, the conductivity of ITO films were not sensitive to the CO 2 gas flow rate over a wide region in contrast to the results to O 2. The optical transmission in the visible spectral region as well as the infrared reflectivity of ITO films varied as the CO 2 flow rate changed. Thus, a better quality ITO film was obtained by the RLVIP technique with reactive gas of 30 sccm CO 2, having of more than 90% transmittance, above 80% reflectance in long-wave IR and 28.7 Ω/□ sheet resistance.
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