Abstract
The dependence of the resonance frequency of thermally excited microcantilever resonators on temperature has been reported by several papers. All these papers ignored the film grown or deposited on the surface of a cantilever and regarded the beam as a single layer one. As a result, there was difference between the theoretical model and experimental results. The paper proposes a bilayer beam model to calculate the dependence of resonance frequency on temperature. This novel model regard the film as another mechanical layer and takes the induced mass by the surrounding gas into account. The calculated results are in good agreement with experimental results.
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