Abstract
The carbon monoxide (CO) gas sensing performances of Au/SnO x /n-LTPS MOS Schottky diode depending on operating temperature were studied systematically. The n-LTPS is the excimer laser annealed n-type low temperature polysilicon film on glass substrate. The Schottky diode has a nicely sensing ability to CO gas, especially under a higher operating temperature. For example under 200 °C and −3 V bias, the diode exhibits a high ∼546% to 100 ppm CO ambient, which is better than the reported SnO 2 based resistive type CO sensors of 100% and 37%, respectively on poly-alumina and glass substrates. Mechanisms of the higher temperature enhanced CO gas sensing performance were investigated and attributed to positive enthalpy (Δ H o ) sensing reaction, temperature enhanced barrier height lowering (Δ Φ B ) and different generation rates of O − and O 2 - in elevated temperature.
Published Version
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