Dependence of spectral purity of Gd plasma emission around 6.7 nm on laser irradiation conditions

Abstract

Gadolinium is a compelling candidate for the next-generation 6.x nanolithography light source. We present a systematically study on the spectral purity at 6.7 nm in the gadolinium laser produced plasma. Variations in extreme ultraviolet spectra are observed over a wide range of laser focal spot sizes and laser pulse energies due to the combined effect of plasma temperature and opacity. When varying laser focal spot size, ionic populations of Gd ions at different electron temperatures were estimated by the collisional-radiative model for the explanation of changes in the spectral profile. When adjusting the laser pulse energy, modifications in the electron density profile were measured through Nomarski interferometry, and the related optical depth was quantified assisted with a one-dimensional radiation transfer model. Results show that, appropriate laser energy and focal spot size are necessary to achieve the high spectral purity, and with a lens with focal length of f = 175 mm and a laser pulse energy of 100 mJ, a spectral purity of Gd plasma up to 3.7% over range of 5.5–10 nm is achieved.