Abstract
As specimen charging appears the most significant obstacle in x-ray photoelectron spectroscopy (XPS) analysis of insulators, the application of low energy flood gun was investigated. Dependence of silicon 2s peak properties (position and full width at half maximum), on electron flood gun parameters (emission current and accelerating voltage), was observed. In the first stage of the experiment, flood gun accelerating voltage was kept constant at 2 V, and emission current varied from 2 μA to 50 μA. Peak's position shifted towards lower energy values with increase of emission current, reaching referent value for emission current of 50 μA. Full width at half maximum (FWHM) of Si2s peak increased with increase of emission current. In the second stage of the experiment, emission current was kept constant at 2 μA, and accelerating voltage varied from 1.5 V to 3 V. Peak's position shifted towards lower energy values with increase of accelerating voltage, reaching referent value for accelerating voltage of 3 V. FWHM of Si2s peak increased with increase of accelerating voltage. By changing flood gun emission current and accelerating voltage, it is possible to achieve predictable shifts of peaks' positions, and obtain accurate spectrum.
Highlights
Zatim je ubrzavajući napon elektronskog topa držan konstantnim na 2 V, a emisiona struja je menjana u opsegu od 2 μA do 50 μA
By changing flood gun emission current and accelerating voltage, it is possible to achieve predictable shifts of peaks’ positions, and obtain accurate spectrum
Summary
Uzorak polietilena velike gustine komercijalno proizveden, analiziran je korišćenjem rendgenske fotoelektronske spektroskopije. Uzorak je očišćen u ultrazvučnoj kadi dejonizovanom vodom otpornosti 17,6 MΩ/cm. Kao neutralizator naelektrisanja korišćen je dodatni elektronski top (SPECS FG 15/40) sa promenljivom energijom u opsegu od 0 do 500 eV. Da bi se uklonile površinske nečistoće uzorak je očišćen jonima argona energije 5 keV u trajanju od 10 s. Prvi XPS spektar polietilena je snimljen u opsegu energija od 0 do 1000 eV. U toku snimanja tog spektra emisiona struja dodatnog elektronskog topa je bila 2 μA, a ubrzavajući napon 2 V. Zatim je ubrzavajući napon elektronskog topa držan konstantnim na 2 V, a emisiona struja je menjana u opsegu od 2 μA do 50 μA. U drugoj seriji snimanja XPS spektara, emisiona struja elektronskog topa je držana konstantnom na 2 μA, dok je ubrzavajući napon menjan u opsegu od 1,5 do 3 V
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