Abstract
Solution growth using a Si–Cr-based solvent is a promising process to produce high quality 4H–SiC single crystal. Computational fluid dynamics simulation is an effective method to estimate and control the temperature and fluid flow in the process, although simulations are presently performed using the physical properties of liquid silicon due to the lack of data for properties of the alloy solvent. In the present work, the density, surface tension, and viscosity of liquid Si–18, 40, and 50 mol% Cr alloys were measured by electrostatic levitation. Computational fluid dynamics simulation was carried out using the measured melt properties and compared with those of liquid silicon. Simulation of the Si–40 mol%Cr solvent predicted a larger fluid velocity and smaller temperature distribution in solution than those of the pure silicon solvent.
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