Abstract
In this study, we synthesized dense metal oxide films from a metal-ethylenediaminetetraacetic acid complex using a flame sprayer. Erbium oxide (Er2O3), Yttrium oxide (Y2O3) films were synthesized on stainless steel substrates using N2, air (O2+N2), or O2 as the carrier gas and a H2-O2 mixture as the combustion gas. When O2 was used as the carrier gas, 9.9–20.5μm-thick oxide layers were deposited on the SUS substrate. The cross-sectional porosities of the films were 3–5%. In contrast, oxide layers with 8.1–15.8μm thickness were synthesized on stainless steel substrates when N2 and air were used as the carrier gases. The cross-sectional porosities of these films were 16.1–23.4%. These results indicated that the carrier gas plays an important role in determining the thickness and porosity of the resulting film.
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