Dense and smooth epitaxial BaTiO3 thin films by the dipping-pyrolysis process

Abstract

Dense and smooth BaTiO3 thin films were prepared on SrTiO3 (100) substrates by the dipping-pyrolysis process using a mixed precursor solution of barium and titanium naphthenates. Combination effects of prefiring [at 150–450 °C in air or low oxygen partial pressure, p(O2)[ and final heat treatment [at 850 °C in air or low p(O2)[ on preparation of BaTiO3 thin films were examined. An epitaxial BaTiO3 thin film with a dense and smooth surface consisting of nanosized grains about 70 nm was prepared by prefiring under low p(O2) at 250 °C and final heat treatment under low p (O2) at 850 °C.