Abstract
High throughput qualification of semiconductor devices is needed to improve cost efficiency. This paper describes a nano-precision capable, multi-agent, flexible positioning platform, which can be used to increase (metrology) throughput in semiconductor industry by parallelization of measurements. It is based on magnetic levitation and control in 6-DoF, combining large x- and y-motions with sub-nanometer scanning resolution in a single stage. The system architecture of this flexible positioning platform has the ability to operate many devices in parallel. Each device can function as a lab-on-instrument to perform various tasks at the nano-scale, e.g. metrology, inspection, deposition, transport, cleaning, etc. A demonstrator setup was successfully designed, built and tested. With coarse positioning sensors a position resolution at sub-micrometer level is achieved, while the maximum acceleration and speed are above 10m/s2 and 1 m/s respectively. Future testing includes integration of sub-nanometer-precision sensors and local control optimization to demonstrate sub-nanometer scanning performance.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
