Abstract
We have demonstrated a near-field scanning microwave microscopy (SMM) based on an atomic force microscopy (AFM) with mechanical impedance tuning techniques and interferometric circuits for precise measurement for characteristics of various material under test (MUT). Recent commercial SMM system has fixed impedance matching circuit in commercial product and some types of interferometer structures in prototype or laboratory level system. All system is useful for operator without knowledge of microwave measurements, but they have some limitation of measurement range for material characteristics, i.e. conductivity, permittivity and permeability. It is expected that various characteristics of materials can be measured with the same accuracy by the impedance tuning technique.
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