Abstract
This demonstration presents implantable grid electrodes array and three dimensional microprobe array for neural sensing on free-behaved laboratory rats. A flexible grid electrode array is fabricated for ECoG signal acquiring brain surface signal with 12-um thick parylene-C substrate and platinum sensing electrode. Flexible electrode array provides perfectly fitted to brain surface curvature. The 3D probe array are fabricated by MEMS process with new stacking method for 3D biopotential acquisition in the implanted target volume of tissue. Practical in-vivo recordings including auditory response, brain resection tissue and PZT-induced seizures recording demonstrate the correct function of the proposed neural recording devices.
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