Abstract
Diamond is a promising platform for quantum information technologies (QITs) mainly due to the properties of color centers including spin read-out, magnetic field sensing, and entanglement between different nitrogen-vacancy (NV) centers. High photon collection efficiency is essential for a high fidelity optical single-shot readout of electronic spin in the color center. To avoid total internal reflection, sculpting solid immersion lenses in the diamond surface is an ideal natural choice. Three-dimensional (3D) microstructures can be made in a photoresist material by a special lithography method. These structures can be subsequently transferred into silicon, diamond or other semiconductors by plasma etching with appropriate selectivity. However, this method cannot be directly implemented into making large height diamond microlenses where the selectivity between diamond and the photoresist is very low. In this work, we propose and demonstrate a dual mask method to achieve an overall high selectivity between diamond and photoresist via the interlayer of single crystalline silicon. By tuning the process parameters of the two etching steps, diamond micro-lenses with large variable height are successfully demonstrated..
Highlights
Diamond photonic structures in diamond are key to most of its application in quantum information technologies (QITs) as well as classical technology [1,2,3,4]
The exquisite properties of diamond color centers [5, 6] have led to the realization of solid state single photon source [7, 8], quantum metrology [9, 10], quantum entanglement and teleportation [11,12,13,14,15]
The mutual requirement of utilizing diamond color centers is the high photon collection efficiency, which is essential for high fidelity optical single-shot readout of electronic spin in color center [16]
Summary
Diamond photonic structures in diamond are key to most of its application in quantum information technologies (QITs) as well as classical technology [1,2,3,4]. Many efforts are put into this area and progresses have been made to overcome the TIR in bulk diamonds These include solid immersion lenses [17], vertical nanowire and pillars [18, 19], bottom up structures [20, 21], waveguides [22,23,24], optical cavities [1, 25,26,27,28,29,30], and hybrid photonic structures [31,32,33]. Scanning electron microscope (SEM) and surface profiler have been used to verify the profiles of the micro-lenses
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
