Abstract
The next major step in transmission electron microscopy (TEM) towards improved resolution and usability is the correction of the axial chromatic aberration CC. Our quadrupole-octupole-type CC/CS-corrector consists of ten quadrupole stages. Two of them produce crossed electric/magnetic quadrupole fields for CC-correction and octupole fields for CS-correction. The design allows to compensate for all axial aberration coefficients up to fourth order. The fifth-order axial aberrations are sufficiently small to allow for a spatial resolution of 50pm at 200 and 300kV [1,2]. Moreover, all off-axial aberrations up to third order which increase linearly with the field of view are adjustable. Particularly, the azimuthal off-axial coma of the magnetic objective lens can be compensated. The corrector was built for the TEAM project [3] and is incorporated in a FEI TITAN 80–300 electron microscope below the objective.
Published Version
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