Abstract
An apparatus designed to produce and deliver pure ozone to a sample inside a metal ultrahigh vacuum apparatus is described. Ozone of 96%–97% purity is prepared in a glass vacuum system and converted to a molecular beam of known flux using an all glass doser. The storage lifetime of the O3 at Torr pressure in the glass storage vacuum system (containing a small surface area of metal) has been measured, and it is shown that the rate of O3 destruction during storage is inconsequential for hours of storage.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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