Abstract
50 μm thick polyimide (Kapton, PI) foils were irradiated with 100 keV He +, Ne +, Ar + and Kr + ions to fluences from 1×10 12 to 1×10 16 cm −2, and the structural and compositional changes in the polymer surface layer, degraded by the ion bombardment, were studied by RBS and ERDA techniques. The sheet resistance at room temperature was also measured. Significant hydrogen and oxygen depletion is observed for the ion fluences above 1×10 14 cm −2 in the PI surface layer, the thickness of which is an increasing function of the ion projected range. Measured H and O depth profiles are structureless with the concentration monotonically increasing from the sample surface to the sample bulk where it achieves the value typical for pristine PI. The sheet resistance remains unchanged up to the fluence of 10 14 cm −2 and then it declines rapidly by several orders of magnitude, the decline being more pronounced for heavier ions.
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Schedule a callMore From: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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