Abstract
Micromechanics is an emerging field with many applications in microsensors and microactuators. The processing tool which is needed for these devices must produce three-dimensional structures from many materials with submicron tolerances. Synchrotron based X-ray lithography can be used to fabricate photoresist molds with structural heights to 500 μm and nearly perfect edge acuity. The plastic molds can be converted to metal molds via electroplating. Fabricated metal parts can be assembled to form complex structures. An example of this technique is a fully functional planar, magnetic micromotor which has been fabricated and is in the testing phase.
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