Abstract
Deep ultraviolet (DUV) confocal Raman spectroscopy with excitation at 244 and 229 nm was used to examine a specific chemical-vapor-deposited diamond film. By scanning the surface of this film, it was possible to construct DUV Raman images with micron resolution. The results were compared with those obtained using more conventional excitations in the visible (514 nm) or near-UV (363 nm) spectral ranges, and analyzed in terms of sensitivity and selectivity. DUV Raman images with micron resolution are, to the best of our knowledge, presented for the first time.
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