Abstract
Compact solid-state deep-ultraviolet (DUV) light-emitting diodes (LEDs) go far beyond replacing conventional DUV sources such as mercury lamps. DUV LEDs enable new applications for air, water, and surface sterilization and decontamination, bioagent detection and identification, UV curing, and biomedical and analytical instrumentation. We review materials growth, device physics, design, fabrication, and performance of DUV LEDs with wavelength ranging from 210 to 365 nm, describe prototype systems for water purification and sterilization, and discuss other emerging applications and systems using DUV LEDs.
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