Abstract
In the present study single-crystalline ZnO samples grown from the vapor phase, the melt,and a high-temperature aqueous solution (hydrothermal growth) are investigated beforeand after hydrogen plasma treatments, by means of deep level transient spectroscopy(DLTS) and high-resolution Laplace DLTS. Dominant DLTS peaks are found to appear inthe range of 120–350 K for all materials. The DLTS spectra depend on the procedure ofgrowth of the ZnO. The thermal stabilities of the defects in an oxygen atmosphere andin an oxygen-lean atmosphere are analyzed. The origin of the DLTS peaks isdiscussed.
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