D-band Si-IMPATT diodes with 300 mW CW output power at 140 GHz

Abstract

Silicon flat profile double drift (DD) and double Read (DLHL) IMPATT diodes have been designed and fabricated, using a novel beamlead process. The goal for the design of the active layer is a maximum negative resistance of the device for a given DC power density. Experimental results are 225 mW of RF power with DD diodes and 300 mW for DLHL diodes, both in the 140 GHz range.