Abstract
Damage depths in MgO 〈100〉 after implantation of 150 keV argon, krypton and xenon ions were analyzed by means of α-particle channeling in a backscattering geometry. Ion flucnces ranged between 4 × 1014 to 1 × 1016 at. cm2 and all implantations were performed at room temperature. Even at the highest ion dose only partial lattice disorder was observed, which is typical for ionic crystals. However, in all cases damage depths exceeded the projected ion ranges significantly. This effect becomes more pronounced with increasing ion mass.
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