Abstract
By means of an in-situ Rutherford-backscattering-spectrometry (RBS) channeling technique, we have investigated creation and reduction of irradiation damage in single-crystalline TiN films induced by 1.8 MeV carbon beam. Both the effects of ion channeling and of beam heating on variation of damage level are shown briefly by successive irradiations on the order of 1017 C+/cm2 under different conditions. It is shown that the <100> aligned irradiation with a high-intensity beam repairs almost completely the damage produced by random irradiation where the sample is heated to about 450^°Cbythebeam, whereassimpleheattreatmentupto 600^°Cresultsinlessreductionofthedamage.
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