Abstract
MeV Au + ions were implanted into LiNbO 3 with different fluences ranging from 4 × 10 13 to 5 × 10 14 ions cm −2 at room temperature. In order to investigate the influence of angle of incidence and cut direction of crystal on the damage profile, MeV Au + irradiation in LiNbO 3 was performed under different angles: 7°, 45° and 60° with different cut directions: y-cut and z-cut. The damage behaviour was studied by the Rutherford backscattering (RBS)/channelling technique. A dechannelling analysis of multiple scattering has been made. The extracted damage profile is compared with the TRIM (Transport of Ions in Matter) prediction. The effect of the fluence, ion irradiation angle and crystal cut direction on the damage profile is discussed.
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