Abstract

Here, we report the cw laser operation of electrically pumped GaN-based vertical cavity surface emitting laser (VCSEL). The GaN-based VCSEL has a ten-pair InGaN∕GaN multiple quantum well active layer embedded in a GaN hybrid microcavity of 5λ optical thickness with two high reflectivity mirrors provided by an epitaxially grown AlN∕GaN distributed Bragg reflector (DBR) and a Ta2O5∕SiO2 dielectric DBR. cw laser action was achieved at a threshold injection current of 1.4mA at 77K. The laser emitted a blue wavelength at 462nm with a narrow linewidth of about 0.15nm. The laser beam has a divergence angle of about 11.7° with a polarization ratio of 80%. A very strong spontaneous coupling efficiency of 7.5×10−2 was measured.

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