Current–voltage–time characteristics of the reactive Ar/O2 high power impulse magnetron sputtering discharge

Abstract

The discharge current–voltage–time waveforms are studied in the reactive Ar/O2 high power impulse magnetron sputtering discharge with a titanium target for 400 μs long pulses. The discharge current waveform is highly dependent on both the pulse repetition frequency and discharge voltage and the current increases with decreasing frequency or voltage. The authors attribute this to an increase in the secondary electron emission yield during the self-sputtering phase of the pulse, as an oxide forms on the target.