Abstract
With increasing trend toward automatic manufacture and demands for improved quality, position of ultra-precision machining processes is considered as more and more important. As the main processes of ultra-precision machining, abrasive machining processes can be chiefly divided into free abrasive processes and fixed abrasive processes. Typical techniques such as chemicalmechanical polishing, ELID, Flat Honing and so on have been reviewed and compared with each other in preliminary aspects such as surface quality, finish accuracy and finish efficiency. The development trend of ultra-precision abrasive machining will have great efforts on realizing the integration with high accuracy, high efficiency and low cost.
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