Abstract
We report on the development of MEMS current sensors composed of Fe67.5B22.5Nd6.3Nb3.7 (FBNN) magnetic metallic glass thin films. These current sensors are based on free-standing cantilever structures that benefit from the superior mechanical properties of the metallic glass, such as high fracture toughness and high yield strength. The resonant frequency of the proposed FBNN cantilever was 3.85kHz in the fundamental flexure mode when the length, width and thickness of the cantilever were 750μm, 150μm and 3μm, respectively. A feed wire with a diameter of 500μm was placed close to the FBNN cantilever, and a downshift in the resonance peak was observed when the current intensity through the feed wire increased. The sensitivity of this frequency shift to the current intensity was 5.0√Hz/A when the distance between the cantilever and the wire was 500μm.
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