Abstract
A presently popular method of fabricating superconducting materials is high vacuum evaporation. Because many of the materials used for the new high temperature superconductors have not been commonly evaporated, the knowledge needed to decide if a particular compound might be fabricated is not readily available. In order to facilitate these decisions, rate control characteristics of several currently important superconducting materials are studied (barium, calcium, copper, lanthanum, samarium, strontium and yttrium). This study includes instruments utilizing both quartz crystal and electron impact emission spectrometry transducers. The results reported herein include rate control charts of the pure materials evaporated from 1 to 7 Å s -1 and discussion of any problems encountered in producing the desired films at low rates.
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