Abstract
A hexagonal-BN target was ablated by high-fluence (6 and 12 J/cm2) KrF excimer laser pulses in low-pressure (5 Pa) N2 atmosphere, without any aid of ion bombardment and heating of the Si substrate. Investigations of the deposited films show that the cubic-BN phase was deposited. The film deposited at 6 J/cm2 appears to contain a higher cubic phase content with respect to the one deposited at 12 J/cm2.
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