Abstract
The crystallization of TeOx-Pd films has been studied by differential thermal analysis, X-ray diffraction and transmission electron microscopy. The optical transmittance changes accompanying crystallization are not monotonous, but stepwise with increasing annealing temperature. The changes in films annealed at temperatures lower than 270°C are based on the phase transformation of PdTe from the amorphous to the crystalline state without large grains. For the films annealed at temperatures up to 270°C, large crystal grains of PdTe are observed. On the other hand, no large crystal grains in the recorded spots by laser irradiation are observed though the laser power is increased up to the level sufficient to melt the films. The degree of crystallization in laser-irradiated films is the same as that in films annealed at 270°C.
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