Abstract

We prepared crystalline Ag nanocluster-incorporated RuO 2 electrodes using a radio frequency magnetron cosputtering system for use in thin-film micropseudocapacitors and investigated their structural and electrochemical properties. High-resolution electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy results show that crystalline Ag nanoclusters are well dispersed within an amorphous RuO 2 . The Ag nanocluster-incorporated RuO 2 electrodes show much higher capacitance of ∼ 1306.0 F/cm 3 at 200 mV/s with superb high-rate performance compared to RuO 2 -only electrodes. The improved capacitance is explained in terms of the presence of dispersed Ag nanoclusters embedded within the amorphous RuO 2 matrix having good electrical conductivity.

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