Abstract

Crystal structures of GaAs and InAs whiskers grown by metalorganic vapor phase epitaxy are evaluated by means of a transmission electron microscope. The whiskers are grown epitaxially on GaAs substrates with diameters of 20-100 nm and lengths of 1-5 µm. They have the following characteristics. 1) GaAs whiskers have layered structures with 2-30 nm period, that are the 111 rotating twins of the zinc-blende type. 2) InAs whiskers also have layered structures which consist of wurtzite and zinc-blende type crystals. The wurtzite type InAs is observed for the first time in this study. The volume ratio of these two types strongly depends on the growth conditions, such as substrate temperature and material gas pressure. This suggests that defect-free whiskers with a single phase that are useful for quantum wire devices can be grown by controlling the growth conditions.

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