Abstract
AbstractBa0.7Sr0.3TiO3 (BST) thin films have been deposited on Si substrates under two different temperatures (200 °C and 450 °C) by pulsed laser deposition (PLD) technique. The structural characterization of the BST thin films was performed by X‐ray diffraction (XRD) and the surface morphology was explored by atomic force microscopy (AFM). All films were found to be crystalline with preferred (100) plane orientation. The diffraction patterns from XRD analysis are attributed to cubic perovskite structure. Annealing did not result in considerable change in XRD spectra of the films. The annealing after deposition resulted in increasing of the grain size and had almost no influence on the roughness of the Ba0.7Sr0.3TiO3 thin film. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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