Abstract

We report a force sensor based on a quartz crystal that is used for measuring nanoscale topographic images. The crystal is a length-extensional mode oscillator with a resonant frequency of about 650 kHz. Compared to 33 kHz tuning forks, such crystal sensors have a much higher resonance frequency, which allows for high force sensitivity and a fast response time. The crystal sensor is operated in the shear-force mode, with the probes vibrating parallel to the sample surface. The tip-sample interaction during operation is estimated to be less than 300 pN.

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