Abstract
Beta gallium oxide (β-Ga 2O 3) ceramic bars were heated by electric current under various ambient pressures. In atmospheric pressure, few crystals grew on the rod. In vacuum chamber (6.7×10 −3 Pa), on the other hand, aggregated crystals were grown on the rod. The typical size of the aggregated crystal was approximately 50 μm. Whiskers of β-Ga 2O 3 were grown near the platinum electrodes and their diameter decreased with decreasing pressure. From the results, vacuum condition is considered to be an important factor for β-Ga 2O 3 crystal growth by electric current heating method.
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