Abstract
SF 6, CF 4, and BF 3 are compared as gas-phase reactants of reactive atmosphere processing (RAP) in the crystal growth of alkaline-earth fluorides. To varying degrees, all three agents are corrosive to carbon at the crystal-growth operating temperature of 1500°C. The corrosion rate decreases with an increase in the fluorine bond dissociation energy of the gas-phase reactant.
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