Abstract
Cryopumps with pumping speeds of 5000 to more than 100 000 l/s for nitrogen are used for many applications and particularly for producing clean high vacuum in space simulation chambers. After some general notes on the different pumping mechanisms, some types of appendage and open-type refrigerator-cooled cryopumps are presented as well as a helium-gas-cooled cryopump with extremely low vibrations.
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