Crosstalk-free large aperture electromagnetic 2D micromirror for LiDAR application

Abstract

This paper presents a novel design of a 2D electromagnetic micromirror without crosstalk. The proposed micromirror uses a flexible printed circuit board (FPCB) and four layers of coils embedded in the polyimide layers. The insulated layers of the coil allow for independent actuation of the mirror plate to rotate about two orthogonal axes. The diamond shaped micromirror uses a hyperbola-shaped magnetic field on the coils under the mirror plate and a 45-degrees magnetic field on the coils embedded in the FPCB frame to eliminate the mechanical crosstalk. Finite element analysis was used to predict the novel 2D micromirror’s behavior. The novel 2D micromirror prototype is used in scanning LiDAR, The results indicate that the crosstalk-free pattern yielded significantly clearer results, particularly for detecting object boundaries and reducing barrel distortion. The experimental test has verified the novel crosstalk-free 2D micromirror working principle and showed good scanning quality: no crosstalk and an improvement in the horizontal field of view up to 19% But with the cost of reducing the vertical field of view by up to 12%. The novel 2D micromirror prototype has a large aperture of 19 × 19 mm2, which is very suitable for coaxial scanning LiDAR.