Abstract
We present a cross-sectional transmission electron microscopy (TEM) analysis of a nanogap electrode fabricated by atomic force microscope (AFM) local oxidation. We successfully visualized a nanogap structure composed of Al | Al-oxide | Al with an Al-oxide width of less than 100 nm. We measured the composition of aluminum and oxygen by in situ energy-dispersive X-ray spectroscopy (EDX), and showed that Al is fully oxidized by AFM local oxidation. Our findings demonstrate that the depth of the Al-oxide can be precisely controlled to create a nanogap electrode without damaging the underlying substrate layer.
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