Abstract
An overview is given of available information on cross-sections for inelastic electron scattering in solids with emphasis on the need for cross-section data in electron energy-loss spectroscopy (EELS), X-ray emission spectroscopy (XES), and Auger-electron spectroscopy (AES). After a brief survey of the relevant theory, information is given on inelastic mean free paths of 200–2000 eV electrons in solids (AES), total inner-shell ionization cross sections (AES and XES), partial inner-shell ionization cross section (EELS), and electron-beam-induced damage.
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