Abstract
The cross section of the 12C( 3He,p i ) 14N reaction (for i=0,1,2,3,4) at a reaction angle of 90° has been measured for incident energies between 1.6 and 3.0 MeV. The cross sections of the 12C( 3He,p i ) 14N reaction (for i=1,2), the 12 C( 3 He,α 0) 11 C reaction and the elastic reaction 12C( 3He, 3He) 12C have also been measured at a backward angle of 177.2° for energies between 1.96 and 2.93 MeV. These reactions offer an alternative to the 12C(d,p) 13C nuclear reactions for profiling carbon in the first few microns below the surface due to the fact that reactions induced by 3He particles are more sensitive to the near surface and produce less neutrons than reactions induced by deuterons. Moreover, by using 3He particles, RBS can be performed simultaneously with a good mass resolution to depth profile high Z elements in the sample. The technique has been used to measure the carbon content in a multi-layer C x H y /Ti/C x H y film deposited on silicon.
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