Abstract

The use of liquid metal ion sources to form finely focused probes has enabled analytical imaging by secondary ion mass spectrometry to achieve, in favorable cases, spatial resolution approaching the theoretical localization limits of the method. As a drawback, however, the large intrinsic energy spread of such sources significantly constrains both the minimum size of the probe and the analytical sensitivity-analytical image resolution that are possible. In the context of these limitations, recent applications of a high resolution scanning ion microprobe to studies of Al-Li alloys, high T c superconductors and photoemulsion engineered microcrystals are discussed.

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