Coupled chaotic vibration during pressure detection of micro-resonant pressure sensor

Abstract

In measuring gas pressure, the stiffness of the resonator changes in the micro-resonant pressure sensor. If the design parameters are not chosen correctly, significant variations in vibration, even chaotic vibrations, will occur in the process of gas pressure detection, seriously degrading the detection accuracy and the stability of the sensor. The micro-resonant pressure sensor is in an environment of deep coupling and mutual influence of multiple physical fields when measuring the external environmental pressure. In this work, a multi-field coupling nonlinear vibration model of the resonant sensor used in pressure detection is established, and the multi-field coupling bifurcation, chaos, and other complex vibration characteristics of the sensor system are explored. The influence of the initial gap, the length of the resonator, and the excitation voltage during pressure detection are analyzed, and the stable vibration range of each influencing parameter is determined. The results show that when the sensor measures the pressure, the initial gap of the sensor, the length of the resonator, and the stability of the excitation voltage all decrease, causing unstable vibration of the sensor. In order to obtain stable sensor detection performance, it is necessary to determine the stability range of sensor-related parameters correctly.