Abstract
During gas measurement, there is a mass change of resonator in a micro-resonant gas sensor. If the design parameters are not selected rightly, there will be obvious vibration state change or even chaotic vibration during gas measurement. Here, using multi-field coupled nonlinear dynamics model considering mass change during gas adsorption and desorption, the nonlinear dynamics performance and chaotic vibration of the gas sensor are investigated. Effects of the initial clearance between resonator and base, excitation voltage and dynamic viscosity of the gas on the vibration states are analyzed. Considering mass change during gas adsorption and desorption, the stability intervals of the initial clearance, excitation voltage and dynamic viscosity of the gas are determined. Besides it, a proportional differential control link is used to tune the vibration state of the sensor. Results show that when mass change during gas adsorption and desorption is considered, the stability intervals of the initial clearance, excitation voltage and dynamic viscosity of the gas are reduced. To obtain stable operation performance, these parameters of the sensor should be selected properly. A proportional differential control link can tune the vibration state of the sensor easily.
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