Abstract
An electrostatically driven tunable MEMS Fabry-Perot filter with wide wavelength range from 2.5 /spl mu/m to 4.5 /spl mu/m has been developed for NDIR CO/sub 2//H/sub 2/O gas sensors. The Fabry-Perot filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.
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