Abstract

Individual layers of Ni0.8Fe0.2, Ni0.8Fe0.13Co0.07, TaN, and CrSi, and a full magnetic random access memory stack consisting of NiFeCo/CoFe/Cu/CoFe/NiFeCo/TaN/CrSi multilayers, were etched in high density Cl2/Ar plasmas either with or without concurrent ultraviolet (UV) illumination. Under optimized conditions, etch rate enhancement up to a factor of 5 was obtained for NiFeCo, TaN, and CrSi with UV illumination; whereas the etch rate of NiFe was retarded. Post-etch cleaning with H2 or SF6 plasmas or H2O rinsing was necessary in all cases in order to prevent corrosion of the metal layers from chlorinated etch residues.

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call